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Wafer-scale capacitors produced in one second with rapid heating and cooling process
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Wafer-scale capacitors produced in one second with rapid heating and cooling process

by Riko Seibo
Tokyo, Japan (SPX) Nov 19, 2025

Researchers led by Professor HU Weijin from the Institute of Metal Research at the Chinese Academy of Sciences have demonstrated a fabrication method for energy storage capacitors that completes in one second. Their process uses heating and cooling rates up to 1,000 degrees Celsius per second.

The new approach, described in Science Advances on November 15, applies a rapid flash annealing technique to synthesize relaxor antiferroelectric lead zirconate films on silicon wafers. This process addresses the challenges associated with producing capacitors capable of high energy storage density and operational stability under extreme temperature conditions.

Conventional techniques for creating dielectric energy storage capacitors have typically relied on chemical modification and microstructure engineering. These multi-step processes are time-consuming and can restrict scalability. The flash annealing method streamlines production, resulting in a denser and more uniform film structure. It effectively freezes the paraelectric phase at room temperature, generating nanodomains smaller than three nanometers. The presence of these nanodomains is necessary for achieving relaxor antiferroelectric behavior in the finished films.

The synthesized capacitors reached an energy storage density of 63.5 joules per cubic centimeter and maintained strong polarization even under high electric fields. The flash annealing also prevented the evaporation of volatile lead during synthesis.

Tests on the finished capacitors showed minimal performance degradation after thermal cycling between minus 196 degrees Celsius and plus 400 degrees Celsius. Changes in energy storage density and efficiency remained below three percent, confirming reliable function in both extremely cold and very hot environments. The fabrication process was further validated by successfully producing uniform films on two-inch silicon wafers.

Research Report:Flash annealing - engineered wafer-scale relaxor antiferroelectrics for enhanced energy storage performance

Related Links
Chinese Academy of Sciences Headquarters
Powering The World in the 21st Century at Energy-Daily.com

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